Compositional analysis of thin SiOxNy:H films by heavy-ion ERDA, standard RBS, EDX and AES: a comparison
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چکیده
منابع مشابه
Compositional analysis of polycrystalline hafnium oxide thin films by heavy-ion elastic recoil detection analysis
The composition of polycrystalline hafnium oxide thin films has been measured by heavy-ion elastic recoil detection analysis (HI-ERDA). The films were deposited by high-pressure reactive sputtering (HPRS) with oxygen plasma at pressures between 0.8 and 1.6 mbar and during deposition times between 0.5 and 3.0 hours. Hydrogen was found to be the main impurity and its concentration increased with ...
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چکیده ندارد.
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ژورنال
عنوان ژورنال: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
سال: 2004
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2003.11.003